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Development of a secondary electron energy analyzer for a transmission electron microscope.

Author
Abstract
:

A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

Year of Publication
:
2018
Journal
:
Microscopy (Oxford, England)
Date Published
:
2018
ISSN Number
:
2050-5698
URL
:
https://academic.oup.com/jmicro/article-lookup/doi/10.1093/jmicro/dfx126
DOI
:
10.1093/jmicro/dfx126
Short Title
:
Microscopy (Oxf)
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